Measuring Silicon-on-Insulator (SOI) Films

FilmTek™ Advantages

  • Simultaneous determination of silicon and buried oxide thickness.
  • Fast, accurate, and repeatable measurement of thin and thick SOI films.

Very Thick SOI (285 microns)

SOI.ht3

Thick SOI (100 microns)

SOI.ht1

Thin SOI (50 nm)

SOI.ht2