Characterizing Silicon on Sapphire

FilmTek™ Advantages

  • Simultaneous measurement of silicon thickness and surface roughness.
  • Measure the profile of silicon implant damage using FilmTek’s™ advanced modeling algorithms.
  • Superior film characterization enables accurate and repeatable process monitoring.

Heteroepitaxial Silicon on Sapphire

Si on 13

Silicon Thickness=4987.0 Å RMS Surface Roughness= 28.0 Å

Profile of Implant Damage: Silicon Epi on Sapphire

Si on 19